3D hierarchical architectures based on self-rolled-up silicon nitride membranes
Froeter, Paul, Yu, Xin, Huang, Wen, Du, Frank, Li, Moyang, Chun, Iksu, Kim, Seung Hyun, Hsia, Kuen J, Rogers, John A, Li, XiulingVolume:
24
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/24/47/475301
Date:
November, 2013
File:
PDF, 1.17 MB
english, 2013