ICP etching of polycrystalline diamonds: Fabrication of...

Diamond and Related Materials 2008 / 4 Vol. 17; Iss. 4-5

ICP etching of polycrystalline diamonds: Fabrication of diamond nano-tips for AFM cantilevers

Uetsuka, H., Yamada, T., Shikata, S.
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Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2007.12.071
Date:
April, 2008
File:
PDF, 747 KB
english, 2008
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