Bond density and physicochemical properties of a hydrogenated silicon nitride film
Joong-Whan Lee, Ryong Ryoo, Mu Shik Jhon, Kyoung-Ik ChoVolume:
56
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0022-3697(95)80016-6
File:
PDF, 636 KB
english, 1995