Scaling of high average power, short-pulse CO2 lasers

Journal of Micro/Nanolithography MEMS and MOEMS 2012 / 06 Vol. 11; Iss. 2

Scaling of high average power, short-pulse CO2 lasers

Endo, Akira
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Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.2.021113
Date:
June, 2012
File:
PDF, 1.07 MB
english, 2012
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