Morphology, composition and thermal stability of thin...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2013 / 09 Vol. 7; Iss. 5

Morphology, composition and thermal stability of thin SiO2/HfO2layers grown on silicon by electron-beam evaporation in vacuum

Boryakov, A. V., Vikhorev, A. S., Ershov, A. V., Zubkov, S. Yu., Karzanov, V. V., Nikolichev, D. E.
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Volume:
7
Language:
english
Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451013050078
Date:
September, 2013
File:
PDF, 959 KB
english, 2013
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