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A new approach to control a deflection of an electroplated microstructure: dual current electroplating methods
Yang, Hyun-Ho, Seo, Min-Ho, Han, Chang-Hoon, Yoon, Jun-BoVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/5/055016
Date:
May, 2013
File:
PDF, 2.20 MB
english, 2013