Electromagnetic particle simulation of electron cyclotron resonance microwave discharge
Koh, Wook Hee, Choi, Nak Heon, Choi, Duk In, Oh, Yong HoVolume:
73
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.352825
File:
PDF, 935 KB
english, 1993