Features of TiN film deposition by the vacuum-arc method

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2013 / 07 Vol. 7; Iss. 4

Features of TiN film deposition by the vacuum-arc method

Khamdokhov, A. Z., Teshev, R. Sh., Khamdokhov, Z. M., Kulikauskas, V. S., Chernykh, P. N.
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Volume:
7
Language:
english
Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451013040320
Date:
July, 2013
File:
PDF, 359 KB
english, 2013
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