Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2013 / 07 Vol. 7; Iss. 4
![](/img/cover-not-exists.png)
Features of TiN film deposition by the vacuum-arc method
Khamdokhov, A. Z., Teshev, R. Sh., Khamdokhov, Z. M., Kulikauskas, V. S., Chernykh, P. N.Volume:
7
Language:
english
Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451013040320
Date:
July, 2013
File:
PDF, 359 KB
english, 2013