Apparatus for the magnetron and ion-beam synthesis of...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2013 / 07 Vol. 7; Iss. 4

Apparatus for the magnetron and ion-beam synthesis of multilayer structures

Zabrodin, I. G., Zakalov, B. A., Kas’kov, I. A., Klyuenkov, E. B., Polkovnikov, V. N., Salashchenko, N. N., Starikov, S. D., Suslov, L. A.
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Volume:
7
Language:
english
Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451013040204
Date:
July, 2013
File:
PDF, 133 KB
english, 2013
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