Selective etching of n-type silicon in pn junction...

Nanotechnology 2008 / 04 Vol. 19; Iss. 17

Selective etching of n-type silicon in pn junction structure in hydrofluoric acid and its application in silicon nanowire fabrication

Wang, Huiquan, Jin, Zhonghe, Zheng, Yangming, Ma, Huilian, Li, Tie, Wang, Yuelin
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Volume:
19
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/19/17/175307
Date:
April, 2008
File:
PDF, 380 KB
english, 2008
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