Calibration of the scales of areal surface topography-measuring instruments: part 1. Measurement noise and residual flatness
Giusca, Claudiu L, Leach, Richard K, Helary, Franck, Gutauskas, Tadas, Nimishakavi, LakshmiVolume:
23
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/23/3/035008
Date:
March, 2012
File:
PDF, 1.08 MB
english, 2012