Liquid Injection MOCVD of Dysprosium Scandate Films

Journal of The Electrochemical Society 2007 Vol. 154; Iss. 7

Liquid Injection MOCVD of Dysprosium Scandate Films

Thomas, Reji, Ehrhart, Peter, Roeckerath, Martin, van Elshocht, Sven, Rije, Eduard, Luysberg, Martina, Boese, Markus, Schubert, Juergen, Caymax, Matty, Waser, Rainer
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Volume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2731299
File:
PDF, 1.22 MB
english, 2007
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