Rapid fabrication of semiellipsoid microlens using thermal...

Microelectronic Engineering 2014 / 3 Vol. 115

Rapid fabrication of semiellipsoid microlens using thermal reflow with two different photoresists

Lian, Zhen-Jie, Hung, Shih-Yu, Shen, Ming-Ho, Yang, Hsiharng
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Volume:
115
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.10.025
Date:
March, 2014
File:
PDF, 1.17 MB
english, 2014
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