Resonant RF network antennas for large-area and...

Plasma Sources Science and Technology 2013 / 10 Vol. 22; Iss. 5

Resonant RF network antennas for large-area and large-volume inductively coupled plasma sources

Hollenstein, Ch, Guittienne, Ph, Howling, A A
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Volume:
22
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/22/5/055021
Date:
October, 2013
File:
PDF, 1.11 MB
english, 2013
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