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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Optical Modeling and Performance Predictions - Grating efficiencies comparison study: calculations versus metrology for various types of high groove density gratings at VUV-UV wavelengths
Kuznetsov, Ivan G., Wilkinson, Erik, Content, David A., Boucarut, Rene A., Madison, Timothy J., Kahan, Mark A.Volume:
5178
Year:
2004
Language:
english
DOI:
10.1117/12.507946
File:
PDF, 533 KB
english, 2004