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Squeeze-film damping in the free molecular regime: model validation and measurement on a MEMS
Sumali, HartonoVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/11/009
Date:
November, 2007
File:
PDF, 655 KB
english, 2007