Influence of Si on the target oxide poisoning during...

Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings

Paulitsch, Jörg, Rachbauer, Richard, Ramm, Jürgen, Polcik, Peter, Mayrhofer, Paul Heinz
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Volume:
100
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2013.06.008
Date:
February, 2014
File:
PDF, 941 KB
english, 2014
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