Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings
Paulitsch, Jörg, Rachbauer, Richard, Ramm, Jürgen, Polcik, Peter, Mayrhofer, Paul HeinzVolume:
100
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2013.06.008
Date:
February, 2014
File:
PDF, 941 KB
english, 2014