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High aspect ratio deep UV wire grid polarizer fabricated by double patterning
Weber, T., Käsebier, T., Szeghalmi, A., Knez, M., Kley, E.-B., Tünnermann, A.Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.044
Date:
October, 2012
File:
PDF, 421 KB
english, 2012