Characterization of Thick and Thin Film SiCN for Pressure...

Sensors 2010 / 02 Vol. 10; Iss. 2

Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures

Leo, Alfin, Andronenko, Sergey, Stiharu, Ion, Bhat, Rama B.
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Volume:
10
Language:
english
Journal:
Sensors
DOI:
10.3390/s100201338
Date:
February, 2010
File:
PDF, 849 KB
english, 2010
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