Effect of working gas pressure on interlayer mixing in...

Optical Engineering 2013 / 09 Vol. 52; Iss. 9

Effect of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers

Pershyn, Yuriy P., Gullikson, Eric M., Kondratenko, Valeriy V., Mamon, Valentine V., Reutskaya, Svetlana A., Voronov, Dmitriy L., Zubarev, Evgeniy N., Artyukov, Igor A., Vinogradov, Alexander Vladimir
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Volume:
52
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.OE.52.9.095104
Date:
September, 2013
File:
PDF, 1.71 MB
english, 2013
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