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On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers
Kniknie, T, Bellouard, Y, Homburg, E, Nijmeijer, H, Wang, X, Vlassak, J JVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/1/015039
Date:
January, 2010
File:
PDF, 1012 KB
english, 2010