Fabrication of periodic nanostructures by single-point diamond turning with focused ion beam built tool tips
Sun, J, Luo, X, Chang, W, Ritchie, J M, Chien, J, Lee, AVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/11/115014
Date:
November, 2012
File:
PDF, 2.50 MB
english, 2012