The distribution of ion energies at the substrate in an...

Plasma Sources Science and Technology 2002 / 05 Vol. 11; Iss. 2

The distribution of ion energies at the substrate in an asymmetric bi-polar pulsed DC magnetron discharge

Bradley, J W, Bäcker, H, Aranda-Gonzalvo, Y, Kelly, P J, Arnell, R D
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Volume:
11
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/11/2/307
Date:
May, 2002
File:
PDF, 313 KB
english, 2002
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