![](/img/cover-not-exists.png)
The distribution of ion energies at the substrate in an asymmetric bi-polar pulsed DC magnetron discharge
Bradley, J W, Bäcker, H, Aranda-Gonzalvo, Y, Kelly, P J, Arnell, R DVolume:
11
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/11/2/307
Date:
May, 2002
File:
PDF, 313 KB
english, 2002