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Simulation to Predict Target Erosion of Planar DC Magnetron
Qingquan, Qiu, Qingfu, Li, Jingjing, Su, Yu, Jiao, Jim, FinleyVolume:
10
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/10/5/12
Date:
October, 2008
File:
PDF, 790 KB
english, 2008