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The influence of the magnetic field on ion impact on the cathode of a sputtering magnetron discharge
Li, Jun, Chen, Qing-Ming, Zhang, Wang, Li, Zai-Guang, Pan, J JVolume:
29
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/29/6/031
Date:
June, 1996
File:
PDF, 191 KB
english, 1996