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Influence of the geometrical configuration on the plasma ionization distribution and erosion profile of a rotating cylindrical magnetron: a Monte Carlo simulation
Musschoot, J, Depla, D, Buyle, G, Haemers, J, Gryse, R DeVolume:
39
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/39/18/010
Date:
September, 2006
File:
PDF, 940 KB
english, 2006