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Characterization of an Ar/O 2 magnetron plasma by a multi-species Monte Carlo model
Bultinck, E, Bogaerts, AVolume:
20
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/20/4/045013
Date:
August, 2011
File:
PDF, 967 KB
english, 2011