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Properties of hydrogenated amorphous/nanocrystalline carbon films prepared by plasma enhanced chemical vapour deposition
Huran, J, Zat'ko, B, Boháček, P, Kobzev, A P, Vincze, A, Malinovský, E, Valovič, AVolume:
12
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/12/1/012005
Date:
June, 2010
File:
PDF, 386 KB
english, 2010