Growth evolution of ZnO thin films deposited by RF...

Journal of Physics Conference Series 2012 / 06 Vol. 370

Growth evolution of ZnO thin films deposited by RF magnetron sputtering

Rosa, A M, da Silva, E P, Amorim, E, Chaves, M, Catto, A C, Lisboa-Filho, P N, Bortoleto, J R R
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Volume:
370
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/370/1/012020
Date:
June, 2012
File:
PDF, 979 KB
english, 2012
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