![](/img/cover-not-exists.png)
Thermal Conductivity Measurement of Low-kDielectric Films: Effect of Porosity and Density
Alam, M. T., Pulavarthy, R. A., Bielefeld, J., King, S. W., Haque, M. A.Volume:
43
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-013-2949-5
Date:
March, 2014
File:
PDF, 789 KB
english, 2014