Thermal Conductivity Measurement of Low-kDielectric Films:...

Thermal Conductivity Measurement of Low-kDielectric Films: Effect of Porosity and Density

Alam, M. T., Pulavarthy, R. A., Bielefeld, J., King, S. W., Haque, M. A.
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Volume:
43
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-013-2949-5
Date:
March, 2014
File:
PDF, 789 KB
english, 2014
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