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Young s modulus measurements of silicon nanostructures using a scanning probe system: a non-destructive evaluation approach
Virwani, Kumar R, Malshe, A P, Schmidt, W F, Sood, D KVolume:
12
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/12/6/023
Date:
December, 2003
File:
PDF, 183 KB
english, 2003