Microstructure evolution of radio-frequency magnetron...

Thin Solid Films 2013 / 12 Vol. 548

Microstructure evolution of radio-frequency magnetron sputtered oxide thin films in the Cr–Zr–O system

Spitz, Stefanie, Stueber, Michael, Leiste, Harald, Ulrich, Sven, Seifert, Hans Juergen
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Volume:
548
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.09.038
Date:
December, 2013
File:
PDF, 1.04 MB
english, 2013
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