Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system
Vergöhl, Michael, Rademacher, Daniel, Pflug, AndreasVolume:
241
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.11.033
Date:
February, 2014
File:
PDF, 1.07 MB
english, 2014