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Diffusion studies in magnetron sputter deposited silicon nitride films
Kulczyk-Malecka, J., Kelly, P.J., West, G., G.C.B., Clarke, Ridealgh, J.A.Volume:
255
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.11.027
Date:
September, 2014
File:
PDF, 1.12 MB
english, 2014