Effect of rapid thermal annealing on both the stress and...

Journal of Applied Physics 1993 Vol. 74; Iss. 4

Effect of rapid thermal annealing on both the stress and the bonding states of a-SiC:H films

El Khakani, M. A., Chaker, M., Jean, A., Boily, S., Pépin, H., Kieffer, J. C., Gujrathi, S. C.
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Volume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.354635
File:
PDF, 1.08 MB
english, 1993
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