Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport
Vašina, P, Meško, M, de Poucques, L, Bretagne, J, Boisse-Laporte, C, Touzeau, MVolume:
17
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/17/3/035007
Date:
August, 2008
File:
PDF, 1.29 MB
english, 2008