Fabrication of Titanium Dioxide Thin Films by DBD-CVD Under Atmosphere
Xiwen, Zhang, Yu, Guo, Gaorong, HanVolume:
9
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/9/6/07
Date:
December, 2007
File:
PDF, 319 KB
english, 2007