A novel sputtering technique: Inductively Coupled Impulse...

IOP Conference Series Materials Science and Engineering 2012 / 09 Vol. 39

A novel sputtering technique: Inductively Coupled Impulse Sputtering (ICIS)

Loch, D A L, Ehiasarian, A P
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
39
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/39/1/012006
Date:
September, 2012
File:
PDF, 1.19 MB
english, 2012
Conversion to is in progress
Conversion to is failed