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A novel sputtering technique: Inductively Coupled Impulse Sputtering (ICIS)
Loch, D A L, Ehiasarian, A PVolume:
39
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/39/1/012006
Date:
September, 2012
File:
PDF, 1.19 MB
english, 2012