Reactively co-sputter deposited a-C:H/Cr thin films:...

Thin Solid Films 2013 / 2 Vol. 529

Reactively co-sputter deposited a-C:H/Cr thin films: Material characteristics and optical properties

Cheng, Hsin-Yen, Chiou, Jau-Wern, Ting, Jyh-Ming, Tzeng, Yonhua
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Volume:
529
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.10.025
Date:
February, 2013
File:
PDF, 1.02 MB
english, 2013
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