Effect of feed gas composition effects on the...

Thin Solid Films 2013 / 2 Vol. 529

Effect of feed gas composition effects on the nanotribological properties of diamond-like carbon films

Jeng, Yeau-Ren, Tsai, Ping-Chi, Wu, Kuan-Te, Wang, Yi-Min, Hong, Franklin Chau-Nan, Huang, Shih-Ming, Chen, Kuo-Cheng
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Volume:
529
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.03.107
Date:
February, 2013
File:
PDF, 818 KB
english, 2013
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