Plasma reactivity in high-power impulse magnetron...

Applied Physics Letters 2013 Vol. 103; Iss. 10

Plasma reactivity in high-power impulse magnetron sputtering through oxygen kinetics

Vitelaru, Catalin, Lundin, Daniel, Brenning, Nils, Minea, Tiberiu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
103
Year:
2013
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4819835
File:
PDF, 600 KB
english, 2013
Conversion to is in progress
Conversion to is failed