Sp3 content in ta-C films vs pulse bias width to the substrate: A correlative structural analysis
Rahman, Md. Anisur, Maguire, P., Roy, S.S., McCann, R., McKavanagh, F., McLaughlin, J.A.Volume:
18
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2009.07.009
Date:
November, 2009
File:
PDF, 330 KB
english, 2009