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Thick CrN/AlN superlattice coatings deposited by the hybrid modulated pulsed power and pulsed dc magnetron sputtering
Lin, Jianliang, Zhang, Niingyi, Wu, Zhili, Sproul, William D., Kaufman, Michael, Lei, Mingkai, Moore, John J.Volume:
228
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2011.11.037
Date:
August, 2013
File:
PDF, 914 KB
english, 2013