Spatial and temporal development of the plasma potential in differently configured pulsed magnetron discharges
Welzel, Th, Dunger, Th, Liebig, B, Richter, FVolume:
10
Language:
english
Journal:
New Journal of Physics
DOI:
10.1088/1367-2630/10/12/123008
Date:
December, 2008
File:
PDF, 1.48 MB
english, 2008