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Chemical Bonding in Composite SiN x /Diamond-Like Carbon Films Prepared by Filter Cathodic Arc Deposition of Graphite Incorporated with Radio Frequency Sputtering of Silicon Nitride
Bunnak, Phuwanai, Gong, Yongping, Limsuwan, Supanee, Pokaipisit, Artorn, Limsuwan, PichetVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.095501
Date:
September, 2013
File:
PDF, 613 KB
english, 2013