Origins of ion energy distribution function (IEDF) in high...

Journal of Physics D Applied Physics 2008 / 05 Vol. 41; Iss. 9

Origins of ion energy distribution function (IEDF) in high power impulse magnetron sputtering (HIPIMS) plasma discharge

Hecimovic, A, Burcalova, K, Ehiasarian, A P
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Volume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/9/095203
Date:
May, 2008
File:
PDF, 781 KB
english, 2008
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