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Voltage-controlled DC reactive magnetron sputtering of indium-doped zinc oxide films
Czternastek, H, Brudnik, A, Jachimowski, M, Kolawa, EVolume:
25
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/25/5/019
Date:
May, 1992
File:
PDF, 353 KB
english, 1992