Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation
Brzobohatý, O, Buršíková, V, Nečas, D, Valtr, M, Trunec, DVolume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/3/035213
Date:
February, 2008
File:
PDF, 363 KB
english, 2008