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Numerical Analysis of Tuning Procedure of a Waveguide-Based Microwave Plasma Source
Nowakowska, Helena, Jasi¿ski, Mariusz, Mizeraczyk, JerzyVolume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2011.2158453
Date:
November, 2011
File:
PDF, 322 KB
english, 2011