Numerical Modeling of Gas-Phase Nucleation and Particle...

Journal of The Electrochemical Society 2000 Vol. 147; Iss. 6

Numerical Modeling of Gas-Phase Nucleation and Particle Growth during Chemical Vapor Deposition of Silicon

Girshick, S. L., Swihart, M. T., Suh, S.-M., Mahajan, M. R., Nijhawan, S.
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Volume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393525
File:
PDF, 357 KB
english, 2000
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